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　　摘要 在具有新型谐振腔的微波等离子体CVD装置上，利用乙醇和氢气为工作气体在石英玻璃管外表面沉积了均匀、致密的纳米金刚石薄膜。采用扫描电子显微镜、Raman光谱及X射线衍射表征了金刚石薄膜的质量；设计腐蚀实验检验了金刚石薄膜的抗腐蚀效果。结果表明：在反应气压为5．5 kPa、碳源浓度为8 vo1％、石英玻璃管温度为500oC的条件下，得到的纳米金刚石薄膜能有效增强石英玻璃管的抗腐蚀性能。（金刚石与磨料磨具工程2009年第一期）
　　
　　Abstract Uniform and compact nanocrystalline diamond thin films were deposited on quartz tube substrate with the gas mixture of ethanol and hydrogen by microwave plasma CVD equipment which has a novel type of resonance cavity．The quality of diamond thin films were tested by SEM，Raman spectroscopy and XRD．A corrosion experiment was designed to test the anti—corrosion effect of diamond thin films．The results showed that when the reaction pressure is 5.5 kPa，the ethanol concentration is 8 vo l％，the reaction temperature is 500 oC，the nanocrystalline diamond thin film could be obtained，which is able to enhance the anti—corrosion
performance of quartz tube．