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　　摘要 本文采用电子辅助增强热丝化学气相沉积(HFCVD)系统，CH4／H2、CH4／H2／Ar气体和不同比例的四种气氛制备了纳米金刚石薄膜，利用Raman光谱和原子力显微镜(AFM)表征了薄膜的结构和显微形貌，采用纳米压入测试技术测量了纳米金刚石薄膜的显微力学特性，获得了加载、卸载曲线，以及硬度和模量随压入深度的变化曲线。结果表明：薄膜具有明显的纳米结构特点，随着CH4、Ar浓度的增加，晶粒更加细化，表面粗糙度更低。无Ar气氛制备的纳米金刚石薄膜的弹性恢复较好，硬度和模量较高，CH4和Ar含量越低的制备气氛，其硬度和模量相对较高。（金刚石与磨料磨具工程2009年第一期）
　　
　　Abstract In this paper，nanocrystalline diamond films were prepared by using CH4／H2，CH4／H2／Ar with different concentration in electron enhanced hot filament chemical vapor deposition(HFCVD)system．Scanning electron microscopy(SEM)and atom force microscopy(AFM)as well as Raman scattering spectra were employed to characterize the as—grown films．The micro—mechanical properties were measured by nano—indentation method．The uploading and downloading curves and the variety of hardness and Young’s modulus with indentation depth were gained．The results showed that diamond film had a special nano—scaled structure．The higher the CH4 and Ar gas concentration，the finer the grain size and the lower the surface roughness．
　　The nanocrystalline diamond films deposited without Ar gas have a favorable elasticity restoring capacity and a higher average hardness and Young，s modulus．With lower CH4 and Ar gas concentration，the average hardness and Young，s modulus of the films got higher．